Ultra High Purity Single Stage Low Flow Regulator
GENTEC® U53SL Series Stainless Steel Regulator is a threadless, high purity Regulator with non-tied diaphragm design. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
Features
• Single-Stage Configuration
• Metal-to-Metal Seal
• 2” Pressure Gauge
• Fully Internal Electropolished
• Cleaned, Assembled, and Packaged for High Purity Semiconductor Application
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Chino, CA 91710, USA
Ordering Info
EX: U53SL | G | K - | G | L | K - | 91 - 91 - | P |
Series | Ports | Seat | Inlet Pressure Range | Outlet Pressure Range | Gauge | Inlet / Outlet Connections | Options |
U53SL | A | K: PCTFE | G: 300 psi | L: 0-30 psig | K: Gauge | 90: 1/4” internal female FSR | P: Panel Mounting |
B | W: No Gauge | 91: 1/4” swivel female FSR | H: Hastelloy® Diaphragm | ||||
G | 92: 1/4” swivel male FSR | ||||||
41: 1/4” weld stub |
Specifications
• Maximum inlet pressure: 300 psig
• Maximum outlet pressure: 30 psig
• Safety test pressure: 1.5 x Maximum inlet pressure
• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)
• Inboard leakage: 0.5 x 10-9 atm cc/sec He
• Outboard leakage: 1 x 10-9 atm cc/sec He
• Leakage across seat: 4 x 10-8 atm cc/sec He
• Maximum Cv: 0.054
• Weight: 3.8 lb
Restrictions
WARNING: Cancer and Reproductive Harm For more information go to www.P65Warnings.ca.gov