Ultra High Purity Single Stage Low Flow Regulator
GENTEC® U21SL Series Single-Stage Stainless Steel Regulator is a hand adjustable, pressure reducing regulator designed for non-corrosive, corrosive, and toxic gas applications. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
Features
• Single-Stage Configuration
• Metal-to-Metal Seal
• 2” Pressure Gauge
• Fully Internal Electropolished
• Cleaned, Assembled, and Packaged for High Purity
Semiconductor Application
• 100% Helium-leak tested
Inquire about this product
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Address
Chino, CA 91710, USA
Ordering Info
EX: U21SL | G | K - | D | G | K | 91 - 91 - | P |
Series | Ports | Seat | Inlet Pressure Ranges | Outlet Pressure Ranges | Gauge | Inlet / Outlet Connections | Options |
U21SL | A | K: PCTFE | D: 3000 psig | F: 0-500 psig | K: psig/kPa | 90: 1/4” internal female FSR | E: Ra 10 µin |
B | F: 500 psig | G: 0-250 psig | P: psig/bar | 91: 1/4” swivel female FSR | P: Panel Mounting | ||
G | I: 0-100 psig | W: No Gauge | 92: 1/4” swivel male FSR | H: Hastelloy® Diaphragm | |||
K: 0-50 psig | 41: 1/4” weld stub | ||||||
L: 0-25 psig |
Specifications
• Maximum inlet pressure: 500 psig (35 bar for B Port), 3000 psig (206 bar for A and G Port)
• Maximum outlet pressure: 500 psig
• Safety test pressure: 1.5 x Maximum inlet pressure
• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)
• Inboard leakage: 2 x 10-8 atm cc/sec He
• Outboard leakage: 2 x 10-9 atm cc/sec He
• Leakage across seat: 4 x 10-8 atm cc/sec He
• Maximum Cv: 0.14
• Weight: 3.8 lb
Restrictions
WARNING: Cancer and Reproductive Harm For more information go to www.P65Warnings.ca.gov