Ultra High Purity Single Stage Medium Flow Regulator

U22SLGK-DGP-95-95-P
Title:
Ultra High Purity Single Stage Medium Flow Regulator
U22SL Series

GENTEC® U22SL Series Stainless Steel Regulators is a purge gas, pressure reducing regulators. It is designed for non-corrosive, corrosive, and toxic gas applications. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

Features

• Single-Stage Configuration 

• Metal-to-Metal Seal 

• 2” Pressure Gauge  

• Fully Internal Electropolished

• Cleaned, Assembled, and Packaged for High Purity 

  Semiconductor Application  

• 100% Helium-leak tested

 

EX: U22SL

G

K -

D

G

K -

95 - 95 - 

P

Series

Ports

Seat

Inlet Pressure Ranges

Outlet Pressure Ranges

Gauge

Inlet / Outlet Connections

Options

U22SL

A

K: PCTFE

D: 3000 psig

G: 0-250 psig

K: psig/kPa

95: 1/2” FSR(F)

E: Ra 10 µin

 

B

 

F: 500 psig

H: 0-150 psig

P: psig/bar

96: 1/2” FSR(M)

P: Panel Mounting

 

G

  

I: 0-100 psig

W: No Gauge 

H: Hastelloy® Diaphragm

    

K: 0-50 psig

   
    

L: 0-25 psig

   

 

 

• Maximum inlet pressure: 500 psig (35 bar for B Port), 3000 psig (206 bar for A   and G Port)

• Maximum outlet pressure: 250 psig

• Safety test pressure: 1.5 x Maximum inlet pressure

• Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)

• Inboard leakage: 2 x 10-8 atm cc/sec He

• Outboard leakage: 2 x 10-9 atm cc/sec He

• Leakage across seat: 4 x 10-8 atm cc/sec He 

• Maximum Cv: 1.1

• Weight: 3.8 lb

 

• Body: 316L Stainless Steel

• Poppet: 316L Stainless Steel, Hastelloy®

• Seat: PCTFE

Diaphragm: 316L Stainless Steel 

• Adjusting Knob: ABS Plastic

 

• Semiconductor

• Solar

• Gas Panels

• OEM