High Purity Corrosion Resistant Single Stage Low Flow Regulator

R51SLGK-DIK-90-90
Title:
High Purity Corrosion Resistant Single Stage Low Flow Regulator
R51SL Series

GENTEC® R51SL Series Corrosion-Resistant Single-Stage Regulator is Diaphragm-Sensed and especially designed for applications where corrosive and toxic gases are used.

Features

• Single-Stage Configuration

• Metal-to-Metal diaphragm to body seal & dual layer sealing ring

• Integrated waste gas disposal connection for additional safety

• Body Port Size: 1/4” FSR(F)

 

EX: R51SL

G

K -

D

I

K -

90 -

90

Series

Body Ports

Seat

Inlet Pressure Range

Outlet Pressure Ranges

Gauge

Inlet Connections

Outlet Connections

R51SL

G

K: PCTFE

D: 3000 psig

F: 0-500 psig

K: psig/kPa

90: Internal

1/4” FSR(F)

90: Internal

1/4” FSR(F)

R51H

(Hastelloy®)

   

G: 0-250 psig

P: psig/bar

  
    

H: 0-150 psig

W: No Gauge  
    

I: 0-100 psig

   
    

K: 0-50 psig

   
    L: 0-25 psig   

 

 

Maximum inlet pressure: 3000 psig

Maximum outlet pressure: 500 psig

Safety test pressure: 1.5 x Maximum inlet pressure

Temperature range: -40˚F~165˚F (-40˚C~ 74˚C)

Inboard leakage: 2 x 10-8 atm.cc/sec He

Outboard leakage: 2 x 10-8 atm.cc/sec He inlet pressure: 1500 psig

Maximum Cv: 0.16

Weight: 3.42 lb

 

Body: 316L (EP) - Stainless Steel, Hastelloy®

Bonnet: 316L Stainless Steel 

Seat: PCTFE 

Valve Stem: C22 Hastelloy® 

Diaphragm: C22 Hastelloy®

 

• Semiconductor Industry

• Solar Energy Industry

• Vacuum Plating Equipment

• Spec Gas Equipment