Ultra High Purity Diaphragm Cylinder Valve is developed for the semiconductor industry. It is designed for use with ultra high purity gas cylinders to prevent gas leakage and achieve the low leakage rates demanded by high purity gas users.
Features
• Manual and actuated versions are available based on a common body design
• Suitable for most special gases including variants for oxygen and highly corrosive gases such as chlorine and hydrogen chloride
• Final assembly and testing is carried out under class 10 clean room conditions
• Designed for the low leakage rates demanded by high purity gas users
• Non tied-diaphragm construction; the diaphragms act directly on the seat to close the valve, which minimizes dead space and wetted area
• Mechanically supported and retained valve seat to minimize deformation under load and seat lift under reverse flow conditions
• The diaphragm isolates the operating mechanism from the process fluids
• The one-piece, non-welded construction improves durability
• To prevent the shedding of particulate contamination, there are no sliding, rotating or rubbing components in the flow path
• Inlet and outlet port configurations are available to suit all known industry standards. The same valve family can be used for all fluids in all market areas
• For transportation the actuator can be locked closed to prevent shock induced leakage
• The outlet port is sealed and protected by a cap retained by a chain
• The valve mechanism incorporates secondary sealing for enhanced safety
Body Material | Series | Cylinder connection* | Outlet Connection* | Valve Seat Material | Safety Plug Model |
SL: 316L SLV: 316L VAR | V600: Manual V601: Pneumatic | N4: 3/4NGT N8: 3/8NGT T2: 1/2NPT B1: BSP, 1”-14(1:8) E2: EN629-1 25E D2: DIN477 W28.8*1/14 J2: JIS B8246 V2 P2: GB PZ27.8 | C350: CGA350 D632: CGA632 (DISS) C660: CGA660 D714: CGA714 (DISS) D718: CGA718 (DISS)BS03: BS341#03 DN01: DIN477#01 J22R: J22R GB03: G5/8-RH(GB) | K: PCTFE F: Kynar® V: Vespel® L: Nylon® | R4: safety plug (see table below) T1: Flow Restrictor Diameter (T1: 0.3 mm T2: 0.5 mm T3: 1.0 mm T4: 1.75 mm T5: 2.5 mm T6: 3.0 mm) |
* For other connections, please contact Genstar customer service.
Safety Plug Allocation Table
Code | Remark | Features Description | Solution Temperature oF ( °C) | Working Pressure psi (bar) |
R1 | Ni | Rupture disk type | / | 2016 (139) |
R2 | Ni | Rupture disk type | / | 2265 (156) |
R3 | Ni | Solution+rupture disk type | 165 (74) | 2016 (139) |
R4 | Ni | Solution+rupture disk type | 165 (74) | 2265 (156) |
R5 | Ni | Solution+rupture disk type | 212 (100) | 2016 (139) |
R6 | Ni | Solution+rupture disk type | 212 (100) | 2265 (156) |
R7 | Ni | Rupture disk type | / | 1380 (95) |
R10 | SS | Rupture disk type | / | 2016 (139) |
R11 | SS | Solution+rupture disk type | 165 (74) | 2016 (139) |
R12 | SS | Solution+rupture disk type | 165 (74) | 2400 (165) |
R13 | SS | Solution+rupture disk type | 212 (100) | 2265 (156) |
R22 | multicomponent alloy | Soluble washer | 212 (100) | 500 (35) |
R23 | multicomponent alloy | Fusible plug | 165 (74) | 500 (35) |
Valves Specification
• Working pressure: 3300 psi (230 bar)
• Suitable for spec gas applications, including toxic and corrosive gases
• Nominal Bore: 4 mm
• Operating temperature: -4oF ~ 150oF (-20oC ~ 65oC)
• Outboard (gland) Leak rate: < 1x10-9 mbar l/s (200bar He)
• Inlet/Outlet (seat) Leak rate: < 1x10-8 mbar l/s (200bar He)
• Cv: 0.3
Actuator Specification
• A normally-closed actuator is available for all valves
The valve is opened by applying pressure and is closed by spring return
The valve can be locked in the closed position during for additional safety
• Pilot pressure: 70 ~ 120 psi (5 ~ 8 bar)
• Actuating medium: Air or Nitrogen
• Pilot Port: 1/8” NPT
• Materials of Construction: Stainless Steel, Nickel Aluminium Bronze and Hard Anodized Aluminium Alloy
• BODY - 316L stainless steel, 316L VAR stainless steel
• SEAT - PCTFE, Kynar 740, Vespel SP21 or Zytel 103 (Nylon)
• DIAPHRAGM - Elgiloy
No lubrication is used in the flow passages. The seat materials are chosen for maximum compatibility, maintaining gas purity and integrity.
Please feel free to contact Genstar if you have any questions.
Spec Sheet Files
Attachment | Size |
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V600 Series Cylinder Valves.pdf | 301.94 KB |